Paper Title:
Ion Implantation - Tool for Fabrication of Advanced 4H-SiC Devices
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
835-838
DOI
10.4028/www.scientific.net/MSF.389-393.835
Citation
E. V. Kalinina, G. Kholuyanov , Y. Gol'dberg, T. Blank, G. Onushkin, A. M. Strel'chuk, G. Violina, V. Kossov, R. Yafaev, A. Hallén, A. O. Konstantinov, "Ion Implantation - Tool for Fabrication of Advanced 4H-SiC Devices", Materials Science Forum, Vols. 389-393, pp. 835-838, 2002
Online since
April 2002
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Price
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