Paper Title:
Direct Observation of the Solid-Phase Recrystallization of Self-Implanted Amorphous SiC Layer on (11-20), (1-100), and (0001) Oriented 6H-SiC
  Abstract

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Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
843-846
DOI
10.4028/www.scientific.net/MSF.389-393.843
Citation
O. Eryu, D. Matsuo, K. Abe, K. Nakashima, "Direct Observation of the Solid-Phase Recrystallization of Self-Implanted Amorphous SiC Layer on (11-20), (1-100), and (0001) Oriented 6H-SiC", Materials Science Forum, Vols. 389-393, pp. 843-846, 2002
Online since
April 2002
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Price
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