Paper Title:
Infrared Investigation of Implantation Damage in 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 389-393)
Edited by
S. Yoshida, S. Nishino, H. Harima and T. Kimoto
Pages
859-862
DOI
10.4028/www.scientific.net/MSF.389-393.859
Citation
J. Camassel, H. Wang, J. Pernot, P. Godignon, N. Mestres, J. Pascual, "Infrared Investigation of Implantation Damage in 6H-SiC", Materials Science Forum, Vols. 389-393, pp. 859-862, 2002
Online since
April 2002
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Price
$32.00
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