Silicon Carbide and Related Materials 2001
Materials Science Forum Volumes 389 - 393
doi:10.4028/www.scientific.net/MSF.389-393
-
p131
Aluminum Doping of 6H- and 4H-SiC with a Modified PVT Growth Method
[
200 K
]
Authors: Thomas L. Straubinger, Matthias Bickermann, Michael Rasp, Roland Weingärtner, Peter J. Wellmann, Albrecht Winnacker
-
p135
Resistivity Mapping of Semi-Insulating 6H-SiC Wafers
[
369 K
]
Authors: Matthew D. Roth, V.D. Heydemann, W.C. Mitchel, Nikolay K. Yushin, M. Sharma, Shao Ping Wang, Cengiz M. Balkas
-
p139
On the Preparation of Vanadium-Doped Semi-Insulating SiC Bulk Crystals
[
302 K
]
Authors: Matthias Bickermann, Dieter Hofmann, Thomas L. Straubinger, Roland Weingärtner, Albrecht Winnacker
-
p143
Solid-Phase Epitaxial Growth of Bulk SiC Single Crystals
[
249 K
]
Authors: Etienne Pernot, Michel Pons, Mikhail Anikin, O. Chaix-Pluchery, Francis Baillet, Igor Matko, Roland Madar
-
p147
Full Si Wafer Conversion into Bulk 3C-SiC
[
296 K
]
Authors: André Leycuras, Olivier Tottereau, Patrice Vicente, L.A. Falkovsky, P. Girard, Jean Camassel
-
p151
QuaSiC Smart-Cut Substrates for SiC High Power Devices
[
227 K
]
Authors: Fabrice Letertre, E. Jalaguier, Lea Di Cioccio, Francois Templier, Jean Marie Bluet, C. Banc, Igor Matko, Bernard Chenevier, Edwige Bano, Gérard Guillot, Thierry Billon, B. Aspar, Roland Madar, B. Ghyselen
-
p155
CVD SiC Powder for High-Purity SiC Source Material
[
214 K
]
Authors: Sashiro Ezaki, M. Saito, K. Ishino
-
p159
Direct Synthesis and Growth of SiC Single Crystal from Ultrafine Particle Precursor
[
247 K
]
Authors: Yoshimitsu Yamada, Kazukiyo Sagawa
-
p165
Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
[
455 K
]
Authors: Tsunenobu Kimoto, S. Nakazawa, Keiko Fujihira, T. Hirao, Shun-ichi Nakamura, Yi Chen, K. Hashimoto, Hiroyuki Matsunami
-
p171
Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers
[
219 K
]
Authors: Hidekazu Tsuchida, Isaho Kamata, Tamotsu Jikimoto, Kunikaza Izumi
-
p175
Fast Epitaxial Growth of 4H-SiC by Chimney-Type Hot-Wall CVD
[
224 K
]
Authors: Keiko Fujihira, Tsunenobu Kimoto, Hiroyuki Matsunami
-
p179
High-Rate Epitaxial Growth of 4H-SiC Using a Vertical-Type, Quasi-Hot-Wall CVD Reactor
[
200 K
]
Authors: Koh Masahara, Tetsuo Takahashi, Mitsuhiro Kushibe, Takaya Ohno, Johji Nishio, Kazutoshi Kojima, Yuuki Ishida, Takaya Suzuki, Tomoyuki Tanaka, Sadafumi Yoshida, Kazuo Arai
-
p183
Fast Growth and Doping Characteristics of α-SiC in Horizontal Cold-Wall Chemical Vapor Deposition
[
196 K
]
Authors: Shun-ichi Nakamura, Tsunenobu Kimoto, Hiroyuki Matsunami
-
p187
Highly Uniform Epitaxial SiC-Layers Grown in a Hot-Wall CVD Reactor with Mechanical Rotation
[
359 K
]
Authors: Adolf Schöner, Andrey O. Konstantinov, S. Karlsson, R. Berge
-
p191
Growth Characteristics of SiC in a Hot-Wall CVD Reactor with Rotation
[
291 K
]
Authors: Jie Zhang, Urban Forsberg, M. Isacson, Alexsandre Ellison, Anne Henry, Olof Kordina, Erik Janzén