Paper Title:
Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-Deposited TiNi Shape-Memory Alloy Thin Films
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Periodical
Materials Science Forum (Volumes 394-395)
Edited by
Y.Y. Chu and L.C. Zhao
Pages
467-474
DOI
10.4028/www.scientific.net/MSF.394-395.467
Citation
S. Miyazaki, M. Hirano, V.H. No, "Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-Deposited TiNi Shape-Memory Alloy Thin Films", Materials Science Forum, Vols. 394-395, pp. 467-474, 2002
Online since
May 2002
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