Paper Title:
Yield Strength Determination of TiN Film by In-Situ XRD Stress Analysis Method
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 404-407)
Edited by
A.M. Dias, J. Pina, A.C. Batista and E. Diogo
Pages
671-676
DOI
10.4028/www.scientific.net/MSF.404-407.671
Citation
M. Qin, V. Ji, J. H. Xu, J.B. Li, K. W. Xu, S.L. Ma, "Yield Strength Determination of TiN Film by In-Situ XRD Stress Analysis Method", Materials Science Forum, Vols. 404-407, pp. 671-676, 2002
Online since
August 2002
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Price
$32.00
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