X-Ray Stress Measurements of TiCN Thin Films |
| Journal |
Materials Science Forum (Volumes 404 - 407) |
| Volume |
Residual Stresses VI, ECRS6 |
| Edited by |
A.M. Dias, J. Pina, A.C. Batista and E. Diogo |
| Pages |
677-682 |
| DOI |
10.4028/www.scientific.net/MSF.404-407.677 |
| Citation |
Masahide Gotoh et al., 2002, Materials Science Forum, 404-407, 677 |
| Authors |
Masahide Gotoh, Takayuki Murotani, Toshihiko Sasaki, Yukio Hirose |
| Keywords |
Heat Treatment, ODF, Residual Stress, TiCN Films |
| Full Paper |
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