Paper Title:
X-Ray Stress Measurements of TiCN Thin Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 404-407)
Edited by
A.M. Dias, J. Pina, A.C. Batista and E. Diogo
Pages
677-682
DOI
10.4028/www.scientific.net/MSF.404-407.677
Citation
M. Gotoh, T. Murotani, T. Sasaki, Y. Hirose, "X-Ray Stress Measurements of TiCN Thin Films", Materials Science Forum, Vols. 404-407, pp. 677-682, 2002
Online since
August 2002
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Price
$32.00
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