Paper Title:
Texture Evolution in TiN, TaN and W2N Thin Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 408-412)
Edited by
Dong Nyung Lee
Pages
1591-1596
DOI
10.4028/www.scientific.net/MSF.408-412.1591
Citation
I. S. Kim, S. Dost, "Texture Evolution in TiN, TaN and W2N Thin Films", Materials Science Forum, Vols. 408-412, pp. 1591-1596, 2002
Online since
August 2002
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Price
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