Paper Title:
Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 408-412)
Edited by
Dong Nyung Lee
Pages
1615-1620
DOI
10.4028/www.scientific.net/MSF.408-412.1615
Citation
C. A. Michaluk, D. P. Field, K. A. Nibur, S. I. Wright, R. A. Witt, "Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum", Materials Science Forum, Vols. 408-412, pp. 1615-1620, 2002
Online since
August 2002
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Price
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