Paper Title:
Microtexture Measurement of Copper Damascene Line with EBSD
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 408-412)
Edited by
Dong Nyung Lee
Pages
529-534
DOI
10.4028/www.scientific.net/MSF.408-412.529
Citation
D. I. Kim, J. M. Paik, Y. C. Joo, K. H. Oh, H. C. Lee, K. Dicks, "Microtexture Measurement of Copper Damascene Line with EBSD", Materials Science Forum, Vols. 408-412, pp. 529-534, 2002
Online since
August 2002
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