Paper Title:
Low-Energy Broad-Beam Sputter Deposition of TiNx Thin Films
  Abstract

  Info
Periodical
Edited by
Dragan P. Uskokovic, Giovani A. Battiston, Slobodan K. Milonjic, Dejan I. Rakovic
Pages
159-164
DOI
10.4028/www.scientific.net/MSF.413.159
Citation
B. Goncić, N. Popović, Ž. Bogdanov, S. Zec, M. Zlatanović, "Low-Energy Broad-Beam Sputter Deposition of TiNx Thin Films", Materials Science Forum, Vol. 413, pp. 159-164, 2003
Online since
September 2002
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