Low-Energy Broad-Beam Sputter Deposition of TiNx Thin Films |
| Journal |
Materials Science Forum (Volume 413) |
| Volume |
Contemporary Studies in Advanced Materials and Processes |
| Edited by |
Dragan P. Uskokovic, Giovani A. Battiston, Slobodan K. Milonjic, Dejan I. Rakovic |
| Pages |
159-164 |
| DOI |
10.4028/www.scientific.net/MSF.413.159 |
| Citation |
B. Goncić et al., 2002, Materials Science Forum, 413, 159 |
| Authors |
B. Goncić, N. Popović, Ž. Bogdanov, S. Zec, M. Zlatanović |
| Keywords |
Ion Beam Reactive Sputtering, Preferred Orientation, Resistivity TiN Thin Films |
| Full Paper |
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