Paper Title:
Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 414-415)
Edited by
J. Gyulai
Pages
69-74
DOI
10.4028/www.scientific.net/MSF.414-415.69
Citation
H. Csorbai, P. Fürjes, G. Hárs, C. Dücső, I. Bársony, E. Kálmán, P. Deák, "Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors", Materials Science Forum, Vols. 414-415, pp. 69-74, 2003
Online since
January 2003
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