Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors |
| Journal |
Materials Science Forum (Volumes 414 - 415) |
| Volume |
Materials Science, Testing and Informatics I |
| Edited by |
J. Gyulai |
| Pages |
69-74 |
| DOI |
10.4028/www.scientific.net/MSF.414-415.69 |
| Citation |
Hajnalka Csorbai et al., 2003, Materials Science Forum, 414-415, 69 |
| Online since |
January, 2003 |
| Authors |
Hajnalka Csorbai, P. Fürjes, G. Hárs, Csaba Dücső, István Bársony, Erika Kálmán, Peter Deák |
| Keywords |
Corrosion, CVD Reactor, Mechanical Sensor, Nucleation, Polycrystalline Diamond Films, Resistance |
| Full Paper |
Get the full paper by clicking here
|
