Paper Title:
Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 426-432)
Main Theme
Edited by
T. Candra, Jose Maria Torralba and T. Sakai
Pages
2243-2248
DOI
10.4028/www.scientific.net/MSF.426-432.2243
Citation
Y. S. Kim, S. H. Yang, C. I. Kim, S. S. Lee, "Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components", Materials Science Forum, Vols. 426-432, pp. 2243-2248, 2003
Online since
August 2003
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