Paper Title:
On Production of Nanocrystalline Ternary Nitride Coatings via Magnetron Sputtering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 426-432)
Main Theme
Edited by
T. Candra, Jose Maria Torralba and T. Sakai
Pages
2473-2478
DOI
10.4028/www.scientific.net/MSF.426-432.2473
Citation
R. Wuhrer, G. McCredie, W. Y. Yeung, "On Production of Nanocrystalline Ternary Nitride Coatings via Magnetron Sputtering", Materials Science Forum, Vols. 426-432, pp. 2473-2478, 2003
Online since
August 2003
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