Paper Title:
Evaluation of Interface Strength between Thin Films Fabricated on a Silicon Substrate for an Advanced LSI on the Basis of Fracture Mechanics Concept
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 426-432)
Main Theme
Edited by
T. Candra, Jose Maria Torralba and T. Sakai
Pages
3469-3474
DOI
10.4028/www.scientific.net/MSF.426-432.3469
Citation
T. Shibutani, T. Tsuruga, Q. Yu, M. Shiratori, "Evaluation of Interface Strength between Thin Films Fabricated on a Silicon Substrate for an Advanced LSI on the Basis of Fracture Mechanics Concept", Materials Science Forum, Vols. 426-432, pp. 3469-3474, 2003
Online since
August 2003
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.