Paper Title:
Comparison between Ar and N2 for High-Temperature Treatment of 4H-SiC Substrates
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
119-124
DOI
10.4028/www.scientific.net/MSF.433-436.119
Citation
G. Younes, G. Ferro, C. Jacquier, J. Dazord , Y. Monteil, "Comparison between Ar and N2 for High-Temperature Treatment of 4H-SiC Substrates", Materials Science Forum, Vols. 433-436, pp. 119-124, 2003
Online since
September 2003
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