Paper Title:
Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
141-144
DOI
10.4028/www.scientific.net/MSF.433-436.141
Citation
J. Mezière, M. Pons, J. M. Dedulle, E. Blanquet, P. Ferret, L. Di Cioccio, T. Billon, "Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC", Materials Science Forum, Vols. 433-436, pp. 141-144, 2003
Online since
September 2003
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