Paper Title:
Nitrogen Delta Doping in 4H-SiC Epilayers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
153-156
DOI
10.4028/www.scientific.net/MSF.433-436.153
Citation
A. Henry, L. Storasta, E. Janzén, "Nitrogen Delta Doping in 4H-SiC Epilayers", Materials Science Forum, Vols. 433-436, pp. 153-156, 2003
Online since
September 2003
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