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On the Early Stages of Sublimation Growth of 4H-SiC Using 8° Off-Oriented Substrates

Journal Materials Science Forum (Volumes 433 - 436)
Volume Silicon Carbide and Related Materials - 2002
Edited by Peder Bergman and Erik Janzén
Pages 17-20
DOI 10.4028/www.scientific.net/MSF.433-436.17
Online since September, 2003
Authors D. Schulz, M. Lechner, H. J. Rost, D. Siche, Jürgen Wollweber
Keywords 4H-SiC, Physical Vapor Transport, Single Crystal Growth, Surface Morphology
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