Paper Title:
Computational Modeling for the Development of CVD SiC Epitaxial Growth Processes
  Abstract

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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
177-180
DOI
10.4028/www.scientific.net/MSF.433-436.177
Citation
G. Melnychuck, Y. Koshka, S. Yingquan, M. S. Mazzola, C.U. Pittman, "Computational Modeling for the Development of CVD SiC Epitaxial Growth Processes", Materials Science Forum, Vols. 433-436, pp. 177-180, 2003
Online since
September 2003
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