Growth of High Quality p-Type 4H-SiC Substrates by HTCVD |
| Journal |
Materials Science Forum (Volumes 433 - 436) |
| Volume |
Silicon Carbide and Related Materials - 2002 |
| Edited by |
Peder Bergman and Erik Janzén |
| Pages |
21-24 |
| DOI |
10.4028/www.scientific.net/MSF.433-436.21 |
| Citation |
Björn Sundqvist et al., 2003, Materials Science Forum, 433-436, 21 |
| Online since |
September, 2003 |
| Authors |
Björn Sundqvist, Alexsandre Ellison, A.K. Jonsson, Anne Henry, Christer Hallin, Peder Bergman, Björn Magnusson, Erik Janzén |
| Keywords |
Al Doping, HTCVD, Micropipe, SiC Bulk Growth |
| Full Paper |
Get the full paper by clicking here
|
