Paper Title:
Thin Film SiC Epitaxy on Si(111) from Acetylene Precursor
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
221-224
DOI
10.4028/www.scientific.net/MSF.433-436.221
Citation
V. De Renzi, R. Biagi, U. Del Pennino, "Thin Film SiC Epitaxy on Si(111) from Acetylene Precursor", Materials Science Forum, Vols. 433-436, pp. 221-224, 2003
Online since
September 2003
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$32.00
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