Paper Title:
High-Resolution XRD Investigations of the Strain Reduction in 3C-SiC Thin Films Grown on Si (111) Substrates
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
233-236
DOI
10.4028/www.scientific.net/MSF.433-436.233
Citation
P. Weih, V. Cimalla, C. Förster, J. Pezoldt, T. Stauden, L. Spieß, H. Romanus, M. Eickhoff, M. Hermann, P. M. Masri , O. Ambacher, "High-Resolution XRD Investigations of the Strain Reduction in 3C-SiC Thin Films Grown on Si (111) Substrates", Materials Science Forum, Vols. 433-436, pp. 233-236, 2003
Online since
September 2003
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