Paper Title:
Synchrotron White Beam X-Ray Topography and High Resolution Triple Axis X-Ray Diffraction Studies of Defects in SiC Substrates, Epilayers and Devices
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
247-252
DOI
10.4028/www.scientific.net/MSF.433-436.247
Citation
M. Dudley, X. Huang, W. M. Vetter, P. G. Neudeck, "Synchrotron White Beam X-Ray Topography and High Resolution Triple Axis X-Ray Diffraction Studies of Defects in SiC Substrates, Epilayers and Devices", Materials Science Forum, Vols. 433-436, pp. 247-252, 2003
Online since
September 2003
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