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Towards a Continuous Feeding of the PVT Growth Process: an Experimental Investigation

Journal Materials Science Forum (Volumes 433 - 436)
Volume Silicon Carbide and Related Materials - 2002
Edited by Peder Bergman and Erik JanzĂ©n
Pages 25-28
DOI 10.4028/www.scientific.net/MSF.433-436.25
Citation Didier Chaussende et al., 2003, Materials Science Forum, 433-436, 25
Online since September, 2003
Authors Didier Chaussende, Francis Baillet, Ludovic Charpentier, Etienne Pernot, Michel Pons, Roland Madar
Keywords Bulk Growth, HTCVD, PVT
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