Paper Title:
Conditions for Micropipe Dissociation by 4H-SiC CVD Growth
  Abstract

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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
261-264
DOI
10.4028/www.scientific.net/MSF.433-436.261
Citation
I. Kamata, H. Tsuchida, T. Jikimoto, T. Miyanagi, K. Izumi, "Conditions for Micropipe Dissociation by 4H-SiC CVD Growth", Materials Science Forum, Vols. 433-436, pp. 261-264, 2003
Online since
September 2003
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