Paper Title:
Characteristics of Planar Defects in Shallow Trenches Related to the Presence of Micropipes
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
277-280
DOI
10.4028/www.scientific.net/MSF.433-436.277
Citation
N. Vouroutzis, M. Syväjärvi, J. Stoemenos, R. Yakimova, "Characteristics of Planar Defects in Shallow Trenches Related to the Presence of Micropipes", Materials Science Forum, Vols. 433-436, pp. 277-280, 2003
Online since
September 2003
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