Paper Title:
Orientation-Dependent Defect Formation in Silicon Carbide Epitaxial Layers
  Abstract

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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
281-284
DOI
10.4028/www.scientific.net/MSF.433-436.281
Citation
R. Yakimova, M. Syväjärvi, T. Iakimov, A.O. Okunev, V.E. Udal'tsov, E. Janzén, "Orientation-Dependent Defect Formation in Silicon Carbide Epitaxial Layers", Materials Science Forum, Vols. 433-436, pp. 281-284, 2003
Online since
September 2003
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