HTCVD Grown Semi-Insulating SiC Substrates |
| Journal |
Materials Science Forum (Volumes 433 - 436) |
| Volume |
Silicon Carbide and Related Materials - 2002 |
| Edited by |
Peder Bergman and Erik Janzén |
| Pages |
33-38 |
| DOI |
10.4028/www.scientific.net/MSF.433-436.33 |
| Citation |
Alexsandre Ellison et al., 2003, Materials Science Forum, 433-436, 33 |
| Online since |
September, 2003 |
| Authors |
Alexsandre Ellison, Björn Magnusson, Nguyen Tien Son, L. Storasta, Erik Janzén |
| Keywords |
HTCVD Growth, Intrinsic Defect, Micropipe Closing, Purity, Semi-Insulating Substrate |
| Full Paper |
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