Paper Title:
Dll PL Intensity Dependence on Dose, Implantation Temperature and Implanted Species in 4H- and 6H-SiC
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
345-348
DOI
10.4028/www.scientific.net/MSF.433-436.345
Citation
F.H.C. Carlsson, S.G. Sridhara, A. Hallén, P. Bergman, E. Janzén, "Dll PL Intensity Dependence on Dose, Implantation Temperature and Implanted Species in 4H- and 6H-SiC", Materials Science Forum, Vols. 433-436, pp. 345-348, 2003
Online since
September 2003
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