Paper Title:
Simple Method for Mapping Optical Defects in Insulating Silicon Carbide Wafers
  Abstract

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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
357-360
DOI
10.4028/www.scientific.net/MSF.433-436.357
Citation
M. Mier, J. Boeckl, M. D. Roth, C. M. Balkas, M. Nelson , "Simple Method for Mapping Optical Defects in Insulating Silicon Carbide Wafers", Materials Science Forum, Vols. 433-436, pp. 357-360, 2003
Online since
September 2003
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