Activation Study of Implanted N+ in 6H-SiC by Scanning Capacitance Microscopy |
| Journal |
Materials Science Forum (Volumes 433 - 436) |
| Volume |
Silicon Carbide and Related Materials - 2002 |
| Edited by |
Peder Bergman and Erik Janzén |
| Pages |
375-378 |
| DOI |
10.4028/www.scientific.net/MSF.433-436.375 |
| Citation |
Vito Raineri et al., 2003, Materials Science Forum, 433-436, 375 |
| Online since |
September, 2003 |
| Authors |
Vito Raineri, Lucia Calcagno, Filippo Giannazzo, D. Goghero, F. Musumeci, Fabrizio Roccaforte, Francesco La Via |
| Keywords |
Dopant Activation, Ion-Implantation, Scanning Capacitance Microscopy |
| Full Paper |
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