Paper Title:
Transport Investigation of Low-Nitrogen-Doped 6H-SiC Ion-Implantation vs. In Situ Doping
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
399-402
DOI
10.4028/www.scientific.net/MSF.433-436.399
Citation
P. Terziyska, J. Pernot, S. Contreras, J.-L. Robert, L. Di Cioccio, T. Billon, "Transport Investigation of Low-Nitrogen-Doped 6H-SiC Ion-Implantation vs. In Situ Doping", Materials Science Forum, Vols. 433-436, pp. 399-402, 2003
Online since
September 2003
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