Paper Title:
Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers
  Abstract

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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
459-462
DOI
10.4028/www.scientific.net/MSF.433-436.459
Citation
S. A. Reshanov, O. Klettke, G. Pensl, W. J. Choyke, "Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers", Materials Science Forum, Vols. 433-436, pp. 459-462, 2003
Online since
September 2003
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