Paper Title:
Electrical and Optical Study of 4H-SiC CVD Epitaxial Layers Irradiated with Swift Heavy Ions
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
467-470
DOI
10.4028/www.scientific.net/MSF.433-436.467
Citation
E. V. Kalinina, G. Kholuyanov , G. Onushkin, D.V. Davydov, A. M. Strel'chuk, A.S. Zubrilov, A. Hallén, A. O. Konstantinov, V.A. Skuratov, J. Staňo, "Electrical and Optical Study of 4H-SiC CVD Epitaxial Layers Irradiated with Swift Heavy Ions", Materials Science Forum, Vols. 433-436, pp. 467-470, 2003
Online since
September 2003
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Shinsuke Harada, Mitsuo Okamoto, Tsutomu Yatsuo, Kazuhiro Adachi, Kenji Suzuki, Seiji Suzuki, Kenji Fukuda, Kazuo Arai
1421
Authors: Evgenia V. Kalinina, G. Kholuyanov, Anatoly M. Strel'chuk, D.V. Davydov, Anders Hallén, Andrey O. Konstantinov, A. Nikiforov
705
Authors: Evgenia V. Kalinina, G. Kholuyanov, G. Onushkin, D.V. Davydov, Anatoly M. Strel'chuk, Andrey O. Konstantinov, Anders Hallén, V.A. Skuratov, Andrej Yu. Kuznetsov
Abstract:The influence of the irradiation with neutrons, Kr+ (245 MeV) and Bi+ (710 MeV) ions on the optical and electrical properties of...
377
Authors: V. Khomenkov, D. Bisello, M. Boscardin, Mara Bruzzi, A. Candelori, G.-F. Dalla Betta, A.P. Litovchenko, C. Piemonte, R. Rando, F. Ravotti, N. Zorzi
Abstract:Radiation hardness of silicon detectors based on thin epitaxial layer for the LHC upgrade was studied. No type inversion was observed after...
315
Authors: Lucia Calcagno, Gaetano Izzo, Grazia Litrico, G. Galvagno, A. Firrincieli, Salvatore Di Franco, Marco Mauceri, Stefano Leone, Giuseppe Pistone, Giuseppe Condorelli, F. Portuese, Giuseppe Abbondanza, Gaetano Foti, Francesco La Via
Abstract:High growth rate of 4H-SiC epitaxial layers can be reached with the introduction of HCl in the deposition chamber. The effect of the Cl/Si...
137