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PVT Growth of p-Type and Semi-Insulating 2-Inch 6H-SiC Crystals

Journal Materials Science Forum (Volumes 433 - 436)
Volume Silicon Carbide and Related Materials - 2002
Edited by Peder Bergman and Erik JanzĂ©n
Pages 55-58
DOI 10.4028/www.scientific.net/MSF.433-436.55
Citation Michael Rasp et al., 2003, Materials Science Forum, 433-436, 55
Online since September, 2003
Authors Michael Rasp, Thomas L. Straubinger, Erwin Schmitt, Matthias Bickermann, Horst Sadowski, Sergey A. Reshanov
Keywords 6H-SiC, Aluminium, Bulk Growth, Doping, p-Type SiC, PVT Growth, Resistivity, Semi-insulating (SI), Vanadium
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