Paper Title:
Study of the Wet Re-Oxidation Annealing of SiO2/4H-SiC (0001) Interface Properties by AR-XPS Measurements
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
555-558
DOI
10.4028/www.scientific.net/MSF.433-436.555
Citation
A. Ekoué, O. Renault , T. Billon, L. Di Cioccio, G. Guillot, "Study of the Wet Re-Oxidation Annealing of SiO2/4H-SiC (0001) Interface Properties by AR-XPS Measurements", Materials Science Forum, Vols. 433-436, pp. 555-558, 2003
Online since
September 2003
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