Paper Title:
Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers
  Abstract

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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
637-640
DOI
10.4028/www.scientific.net/MSF.433-436.637
Citation
E. V. Kalinina, G. Kholuyanov , A. A. Sitnikova, V. Kossov, R. Yafaev, G. Pensl, S. A. Reshanov, A. O. Konstantinov, A. Hallén, "Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers", Materials Science Forum, Vols. 433-436, pp. 637-640, 2003
Online since
September 2003
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