Paper Title:
Vacancy-Type Defect Distributions of 11B-, 14N- and 27Al-Implanted 4H-SiC Studied by Positron Annihilation Spectroscopy
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
641-644
DOI
10.4028/www.scientific.net/MSF.433-436.641
Citation
M. S. Janson, J. Slotte, A. Y. Kuznetsov, K. Saarinen, A. Hallén, "Vacancy-Type Defect Distributions of 11B-, 14N- and 27Al-Implanted 4H-SiC Studied by Positron Annihilation Spectroscopy ", Materials Science Forum, Vols. 433-436, pp. 641-644, 2003
Online since
September 2003
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