Paper Title:
Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
645-648
DOI
10.4028/www.scientific.net/MSF.433-436.645
Citation
Z. Zolnai, N.Q. Khánh, T. Lohner, A. Ster, E. Kótai, I. Vickridge, J. Gyulai , "Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide", Materials Science Forum, Vols. 433-436, pp. 645-648, 2003
Online since
September 2003
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