Paper Title:
Electrochemical Etching of n-Type 6H-SiC Using Aqueous KOH Solutions
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
665-668
DOI
10.4028/www.scientific.net/MSF.433-436.665
Citation
M. Kato, M. Ichimura, E. Arai, P. Ramasamy, "Electrochemical Etching of n-Type 6H-SiC Using Aqueous KOH Solutions", Materials Science Forum, Vols. 433-436, pp. 665-668, 2003
Online since
September 2003
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Jae Kwang Lee, Yun Ho Shin, Jin Wook Kang, Yong Sug Tak
Abstract:The effect of chemical pretreatments on the electrochemical etching behavior of aluminum was investigated with the topographic studies of...
1561
Authors: Ming Huan Wang, Qiao Fang Zhang, C.Y. Yao, Wei Peng
Abstract:The machining of materials on microscopic scales is considered to be great importance to a wide variety of fields. Electrochemical...
229
Authors: Masashi Kato, H. Ono, Masaya Ichimura
Abstract:We performed electrochemical deposition of ZnO on the surfaces of 4H-SiC epilayers and characterized Ni Schottky diodes fabricated on the...
669
Authors: J.C. Huang, Yung Jin Weng, Yung Chun Weng, Y.F. Chan, Hsu Kang Liu, H.S. Fang
Abstract:Electrochemical polish technology could enhance the chemo-mechanical polishing efficiency of copper material. During the electrochemical...
159
Authors: Yong Liu, Lin Sen Zhu
Abstract:Electrochemical etching is an appropriate method for fabricating micro electrodes. We present a simple, fast, and cost-effective process for...
1250