Paper Title:
Al/Ti Ohmic Contacts to p-Type Ion-Implanted 6H-SiC: Mono- and Two- Dimensional Analysis of TLM Data
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
673-676
DOI
10.4028/www.scientific.net/MSF.433-436.673
Citation
F. Moscatelli, A. Scorzoni, A. Poggi, G.C. Cardinali, R. Nipoti, "Al/Ti Ohmic Contacts to p-Type Ion-Implanted 6H-SiC: Mono- and Two- Dimensional Analysis of TLM Data", Materials Science Forum, Vols. 433-436, pp. 673-676, 2003
Online since
September 2003
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