Paper Title:
Thermal Etching of 6H-SiC (11-20) Substrate Surface
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
701-704
DOI
10.4028/www.scientific.net/MSF.433-436.701
Citation
T. Nishiguchi, S. Ohshima, S. Nishino, "Thermal Etching of 6H-SiC (11-20) Substrate Surface", Materials Science Forum, Vols. 433-436, pp. 701-704, 2003
Online since
September 2003
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Price
$32.00
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