Paper Title:
Surface Structure of Electrochemically Etched α-SiC Substrates
  Abstract

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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
717-720
DOI
10.4028/www.scientific.net/MSF.433-436.717
Citation
H. Mikami, A. Umetani, T. Hatayama, H. Yano, Y. Uraoka, T. Fuyuki, "Surface Structure of Electrochemically Etched α-SiC Substrates", Materials Science Forum, Vols. 433-436, pp. 717-720, 2003
Online since
September 2003
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