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4H-SiC Power MOSFET Blocking 1200V with a Gate Technology Compatible with Industrial Applications

Journal Materials Science Forum (Volumes 433 - 436)
Volume Silicon Carbide and Related Materials - 2002
Edited by Peder Bergman and Erik Janzén
Pages 769-772
DOI 10.4028/www.scientific.net/MSF.433-436.769
Citation Dethard Peters et al., 2003, Materials Science Forum, 433-436, 769
Online since September, 2003
Authors Dethard Peters, Adolf Schöner, Peter Friedrichs, Dietrich Stephani
Keywords 4H Silicon Carbide, Channel Mobility, Nitridation, Nitrous Oxide, Power MOSFET
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