Paper Title:
A Study of HTCVD Renewing of the SiC Polycrystalline Source during the PVT Process
  Abstract

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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
87-90
DOI
10.4028/www.scientific.net/MSF.433-436.87
Citation
L. Charpentier, F. Baillet, D. Chaussende, E. Pernot, M. Pons, R. Madar, "A Study of HTCVD Renewing of the SiC Polycrystalline Source during the PVT Process", Materials Science Forum, Vols. 433-436, pp. 87-90, 2003
Online since
September 2003
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