Investigation of Mass Transport during SiC PVT Growth Using Digital X-Ray Imaging, 13C Labeling of Source Material and Numerical Modeling |
| Journal |
Materials Science Forum (Volumes 433 - 436) |
| Volume |
Silicon Carbide and Related Materials - 2002 |
| Edited by |
Peder Bergman and Erik Janzén |
| Pages |
9-12 |
| DOI |
10.4028/www.scientific.net/MSF.433-436.9 |
| Citation |
Peter J. Wellmann et al., 2003, Materials Science Forum, 433-436, 9 |
| Online since |
September, 2003 |
| Authors |
Peter J. Wellmann, Z.G. Herro, M. Selder, F. Durst, Roland Püsche, Martin Hundhausen, Lothar Ley, Albrecht Winnacker |
| Keywords |
Physical Vapor Transport Growth, Raman Spectroscopy, Si13C, Source Material, X-Ray Imaging |
| Full Paper |
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