Paper Title:
SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
937-940
DOI
10.4028/www.scientific.net/MSF.433-436.937
Citation
U. Zimmermann, J. Österman, A. Galeckas, A. Hallén, "SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers", Materials Science Forum, Vols. 433-436, pp. 937-940, 2003
Online since
September 2003
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