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Morphological Features of Sublimation-Grown 4H-SiC Layers

Journal Materials Science Forum (Volumes 433 - 436)
Volume Silicon Carbide and Related Materials - 2002
Edited by Peder Bergman and Erik JanzĂ©n
Pages 95-98
DOI 10.4028/www.scientific.net/MSF.433-436.95
Citation D. Schulz et al., 2003, Materials Science Forum, 433-436, 95
Online since September, 2003
Authors D. Schulz, J. Doerschel
Keywords 4H-SiC, Physical Vapor Transport, Single Crystal Growth, Surface Morphology
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