Paper Title:
Growth and Characterization of Epitaxial Wurtzite Al1-xInxN Thin Films Deposited by UHV Reactive Dual DC Magnetron Sputtering
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Periodical
Materials Science Forum (Volumes 433-436)
Edited by
Peder Bergman and Erik Janzén
Pages
987-990
DOI
10.4028/www.scientific.net/MSF.433-436.987
Citation
T. Seppänen, G. Z. Radnóczi, S. Tungasmita, L. Hultman, J. Birch, "Growth and Characterization of Epitaxial Wurtzite Al1-xInxN Thin Films Deposited by UHV Reactive Dual DC Magnetron Sputtering", Materials Science Forum, Vols. 433-436, pp. 987-990, 2003
Online since
September 2003
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